Growth of Heteroepitaxial CVD Diamond Films on Ir/YSZ/Si(001) for Detector Applications* C. Stehl1 , S. Gsell1 , M. Fischer1 , M. Schreck1,#, E. Berdermann2 , M. S. Rahman2 , and M. Träger2 1 Universität Augsburg, Germany; 2GSI, Darmstadt, Germany In the framework of the CARAT collaboration, which executes work package 15 of the EU FP7 “HadronPhysics2” project, the diamond group at the University of Augsburg is responsible for the development and growth of heteroepitaxial diamond films, which shall be used in particular for tracking and ToF measurements of heavy ions and minimum ionising particles. Motivation For future particle accelerator experiments, e.g. at FAIR, we are developing novel, advanced diamond sensors grown by chemical vapour deposition (CVD), capable on one hand of replacing the commonly used silicon tracking devices and being on the other hand an advantageous alternative to polycrystalline or single-crystal diamond sensors used so far in beam diagnostics and...